In the field of semiconductor chip manufacturing, the "cleanliness" of pipeline systems for transporting ultra-high-purity chemicals directly affects device yield. As the "golden blood vessels" of chemical delivery systems, Ultra-Clean PFA Tubes are widely used.
PFA, or Perfluoroalkoxy Alkane, is a high-performance material copolymerized from tetrafluoroethylene (TFE) and a small amount of perfluoroalkyl vinyl ether. Compared with traditional polytetrafluoroethylene (PTFE), PFA not only possesses excellent chemical corrosion resistance, a low friction coefficient, and good electrical insulation (unaffected by temperature), but also offers better melt adhesion and lower melt viscosity. It can withstand long-term high temperatures of 260℃, enabling the production of complex-structured pipes and components through processes such as melt extrusion.
High-purity PFA materials undergo multiple precision processing steps—including melting, extrusion, and molding—to become finished tubes. During manufacturing, micro-abrasion of metal parts in equipment, suspended particles in the environment, and fluctuations in process parameters may introduce new pollution sources. Therefore, verifying the purity of Ultra-Clean PFA Tubes is crucial.
The purity of Ultra-Clean PFA Tubes is primarily reflected in two key indicators: metal ion leaching amount and particle release level.
The semiconductor industry imposes extremely high purity requirements on Ultra-Clean PFA Tubes. Consequently, the industry typically adopts accelerated extraction tests under extreme conditions to evaluate product reliability.
The testing methods for Ultra-Clean PFA Tubes are as follows:
In a Class 100 cleanroom laboratory, high-sensitivity equipment such as the ICP-MS/MS 8900 (Inductively Coupled Plasma Tandem Mass Spectrometry) is used. The PFA tube is continuously immersed in 37% high-concentration hydrochloric acid at 85℃ to simulate its long-term service under high-temperature and highly corrosive conditions. The content of leached metal ions is accurately measured to comply with the SEMI F57 standard.
Particle size distribution and counting are used as key indicators, measured and controlled by a Liquid Particle Counter (LPC).
Total Organic Carbon (TOC), UV absorption, and Non-Volatile Residue (NVR) are controlled in accordance with respective reagent standards. For solvents, additional tests include water content (Karl Fischer, KF), UV background, and residues.
To further ensure product reliability under high pressure, high temperature, and complex media, a comprehensive performance evaluation system also includes multiple physical and appearance tests:
Including hardness, tensile strength, elastic modulus, and high-pressure "burst" testing, to ensure the PFA tube maintains structural integrity under high pressure and temperature.
Checking inner diameter, outer diameter, wall thickness, eccentricity, surface smoothness, gloss (absence of impurities, bends, or abrasions), and packaging compliance.
Only after passing all tests and meeting standards can Ultra-Clean PFA Tubes leave the factory.
Currently, ultra-high-purity fluoroplastics play an irreplaceable role in semiconductor processes. However, the high-end PFA product market has long been dominated by international enterprises. In recent years, with the increasing demand for autonomy in China’s semiconductor industrial chain, the domestic substitution process has gradually kicked off in the field of high-purity fluoroplastic products. Among them, highly standardized components such as Ultra-Clean PFA Tubes are emerging as the first batch of products to achieve technological breakthroughs.
Through continuous independent R&D and process optimization, Baoshili has successfully produced Ultra-Clean PFA Tubes that meet the requirements of advanced semiconductor processes. These products have gradually entered the supply chain systems of multiple leading chip manufacturers, providing a practical path for promoting the domestic substitution of high-end materials.
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